Electronic-grade DMF (≥99.99%)
Electronic-grade DMF (≥99.99%) Product Identity
Ultra-high purity DMF (CAS 68-12-2) for semiconductor lithography, meeting SEMI C12 standards.
Unique Highlights
Sub-ppb Metals: Cu/Ni/Fe ≤0.05 ppb (ICP-MS validated)
Nanoparticle Control: ≤5 particles/mL (≥0.1μm, SLAS-4)
Critical Application: EUV photoresist stripping (L/S 5nm nodes)
Technical Specification
| Parameter | Value |
|---|---|
| Anisole content | ≤1 ppm |
| Dielectric constant | 36.91±0.02 (25°C) |
| Outgas (TGA) | ≤50 μg/cm² |
Packaging
20L fluorinated HDPE bottles
Class 10 cleanroom filling
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